专利名称:Semiconductor Memory Device And Method
Of Forming The Same
发明人:Jingyun Kim,Myoungbum Lee,Kihyun Hwang申请号:US13442804申请日:20120409
公开号:US20120193700A1公开日:20120802
专利附图:
摘要:Semiconductor memory devices and methods of forming semiconductormemory devices are provided. The methods may include forming insulation layers andcell gate layers that are alternately stacked on a substrate, forming an opening by
successively patterning through the cell gate layers and the insulation layers, andforming selectively conductive barriers on sidewalls of the cell gate layers in the opening.
申请人:Jingyun Kim,Myoungbum Lee,Kihyun Hwang
地址:Yongin-si KR,Seoul KR,Seongnam-si KR
国籍:KR,KR,KR
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